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How SEI Works
- Optical beam with wavelength below the
semiconductor bandgap locally heats integerated circuit (IC).
- Thermal gradients in IC create Seebeck
(thermal electric) voltages.
- Digital record of voltage versus scanner
position produces SEI image.
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SEI
Applications
- Localization of open conductors.
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| SEI
(left) and reflected-light images of an open conductor, 10th European Symposium on
Reliability of Electron Devices, Failure Physics and Analysis, 991-996 (1999) |
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