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| Each OptoMetrix hardware installation is supplied with OptoVision,
a complete graphical user interface (GUI) application for data acquisition, instrument
control, and image processing. Because of its easy-to- interpret user interface, the
basics of OptoVision can be learned in a few hours. |
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| Data Acquisition and Control |
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Instrument control and data acquisition are a main
component
of any computer controlled measurement instrument.
OptoVision is optimized to
facilitate these processes. Data acquisition is done quickly with the click of a button.
All instrument operations are hands-free for ease-of-use and laser safety compliance.OptoVision
includes three standard data-acquisition modes displayed
on the main window for easy access:
Navigation for real-time image acquisition.
Blink for real-time image differencing for data extraction in cluttered backgrounds.
- Average for integration of single and difference images with weak signals.
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All acquisition modes have the following common
settings:
Imaging mode:
Reflected-Light, Phase-Contrast, and
Image Size (for the Laser Scanning Microscope only).
Image display:
Brightness, Contrast, Flip, Rotate, and Zoom.
Applied to images independently, even during real-time data acquisition.
Some settings specific to each acquisition mode include:
Blink: Single, Continuous, Picture-in-Picture.
Average: Number of Averages, Start/Continue, Picture-in-Picture.
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OptoVision for data acquisition |
| Macro
Language |
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Many test situations require
repetitive or complex test
procedures. OptoVision contains
a macro language for automating these operations and supplying expansion power for the
most
difficult tasks. Features of the OptoVision macro language are:
Microsoftâ Visual Basicâ based
language.
Full access to all OptoVision functions.
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- Macro recording.
- Access to dll’s and ActiveX components from other applications.
- Links into onboard DAQ
and GPIB cards allows
control of additional test interfaces.
The entire data-acquisition
process, including control of
external devices and software applications, can be automated
with the OptoVision macro-
language interface. |
Macro language development environment
with example of opening and transferring data to another application |
| Image Processing |
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| Raw images can sometimes be less than
beautiful. Image processing allows a user to bring out hidden details, enhance hard-to-see
signals, and show correlation between images. OptoVision supplies a range of standard
imaging-processing functions to support these needs, including:
Sharpen, Smooth, and Invert.
Convolution, Filtering Edge, and Detection.
Histograms and Image Statistics.
Threshold and Density Slice.
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3-D Surface Plots.
Image Math (Add, Subtract, Boolean).
All processing functions except
Image Overlay operate on the
precise bit depth used in the instrument—12 bits for the Laser Scanning Microscope
(LSM)
and 10 bits for the Schlieren
Thermal Mapper (STM). Precise
bit depth is an improvement over other image processing applications that typically have
only 8-or 16-bit data types. |
OptoVision for image processing |
| Image Management |
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Images are data and data needs
to be protected, annotated, and organized into logical groups. OptoVision facilitates
these requirements by:
- Protecting images against inadvertent erasure.
Using image stacks to organize and store images.
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Allowing each stack to be annotated with information,
such as text comments, including auto dating, user name, and device ID. Up to eight related images can be grouped into an image stack, and stacks can
contain both original data images and processed images. Up to 32KB of storage is available
for text.
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OptoVision for image management |
| Navigation |
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| Obtaining an image of a defect is only half the battle.
The physical location of the defect on the integrated circuit (IC) is also required to
complete the failure analysis process. Both the STM and LSM systems produce
reflected-light images that are precisely aligned to the defect images. Image overlay,
line plot, and centroiding tools can be used to determine the exact location of the defect
on the reflected-light image. In many instances, the connection between the
reflected-light image and physical location on the IC is also needed, especially in
complex IC's. OptoMetrix has teamed with Karl Suss (probe stations) and Knights (CAD
navigation software) to supply the tools needed to complete the navigation process. These
tools include:
Three point calibration of physical coordinates.
Online and offline transfer of defect coordinates to Knights software.
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In addition to these basic navigation tools, the
OptoVision interface to the Karl Suss probe station offers:
Mosaic imaging for high-resolution, large-area imaging.
Objective XYZ offset correction maintains focus and centering when changing objectives.
Feature centering to automatically bring features to the center of the field of view.
Scope autolift to avoid mechanical crashes.
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